can serve several wafer inspection systems whose capacity is up to 18000 wafers/hour

interaction with Wafer Inspection System, temporary storage and conveyance of wafers, vision inspection of wafer stack side, placement of butter paper, opening and folding of bag, labeling, sorting, temporary storage of sorted packet, boxing, conveyance of boxes, stacking onto pallets, etc.

able to detect the stains and adhesives on the lateral sides of wafer stack

effectively reduce the number of workers and facilitate the automation of plant